Edwards nEXT85D CF63 NW16 80W Turbomolecular Vacuum Pump combines class-leading performance with compact, intelligent design. Engineered for demanding applications, the nEXT85D integrates a turbomolecular pump with a permanently attached controller and drive electronics, delivering powerful vacuum performance and flexible operation options.
Key Features:
- Class-leading pumping speeds up to 85 l/s for N₂ in a reduced footprint
- Enhanced choice with standard and compression-focused variants
- Direct impeller temperature measurement for increased operating envelope
- Customizable interstage and backing port positions for optimized integration
- 4-year service interval with full end-user field serviceability
- Low vibration operation with CMSD-enabled design
- Integrated micro USB port with nST software for monitoring, control, and configuration
- Vent and purge ports (NW16) for process flexibility and protection of internal components
- Wide range of tailored accessories and upgrade options available
Included Items
- Edwards nEXT85D CF63 NW16 80W Turbomolecular Vacuum Pump
- Operator's Manual
- Manufacturer's Documentation
- 1-Year Manufacturer’s Warranty
Specifications
| Compression Ratio | |
| N₂ | >1 x 10¹¹ |
| Ar | 1 x 10⁹ |
| He | 8.5 x 10⁶ |
| H₂ | 2.1 x 10⁵ |
| Interstage Pumping Speed (70 sccm) | |
| N₂, Ar | 6 l/s |
| He | 9 l/s |
| H₂ | 10 l/s |
| Inlet Pumping Speed | |
| N₂ | 85 l/s (CF63) |
| Ar | 80 l/s (CF63) |
| He | 77 l/s (CF63) |
| H₂ | 54 l/s (CF63) |
| Max. Continuous Backing Pressure (N₂) | Up to 16 mbar (23°C, forced air cooled) |
| Max. Continuous Inlet Flow (N₂) | Up to 60 sccm (23°C, forced air cooled) |
| Start Time to 90% Speed | 115 sec |
| Nominal Rotational Speed | 90,000 rpm |
| Backing/Interstage Port | NW16 |
| Vent/Purge Port | NW16 |
| Mass | 4.3 kg (CF63) |